InVac Systems

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InVac Systems, Inc., with over 23 years of experience, is the leading supplier of vacuum flange assemblies for Atmospheric and Low Pressure furnace applications in the semiconductor industry. As the leading supplier of vacuum flange assemblies, InVac Systems, Inc. also, aims to supply its customers with new furnace related products, including quartz and all peripheral and support equipment. Our reputation for superior customer service and quality vacuum products at competitive prices is what your company requires and what InVac Systems, Inc. will provide. We ARE the manufacturers, not the middle man, of semiconductor products. 


Our Mission

InVac Systems, Inc. will custom design each flange assembly to meet your gas, vacuum, and water requirements.  We offer a full range of Swagelok VCRŽ, VCOŽ, Ultra-TorrŽ, tube, and pipe seal fitting end connections for reliable, leak-tight performance.  We can connect to all NW, CF, ISO, ASA, and Ball Socket vacuum seals to maintain your pumping efficiency.


Our History

InVac Systems, Inc. was opened in 2003 after the closing of HD Special Products, Inc. and the retirement of its founder, Bob Higuera.  HD Special products had been designing and retrofitting vacuum end cap flanges since 1982.  HD's client base and flange portfolio has stretched from the US to Europe, and Asia.  HD was the original supplier of vacuum end cap flanges to most all OEM's including SVG/Thermco, MRL, and Expertech.  This knowledge and client base has been passed down and complimented with state of the art CAD expertise, extensive metals & plastic materials knowledge, quartz & silicon carbide design experience, and quality local Texan workmanship that can be unsurpassed.


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Š 2005 InVac Systems, Inc.