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Semiconductor

Specialty Products

 

HTR Vacuum Flanges HTR Back Plates HTR Gas Injectors Flange Accessories VTR Flanges

InVac Systems offers a full line of vacuum flange assemblies and products for Atmospheric and Low Pressure applications.  Whether your process is Poly Silicon, Silicon Nitride, Teos, or Low Temperature Thermal Anneals, we have flanges to meet your requirements.

Horizontal Furnace - Vacuum End Cap Flanges

We will custom design each front and rear flange to meet your requirements. 

Horizontal Furnace - Rear Flange Back Plates

Our back plates can adapt to almost any vacuum connection: ISO, KF, etc...  We offer many types of profile TC and injector port configurations including Ultra-Torr and stainless steel ball joint connections.

Horizontal Furnace - Gas Injectors

Specialty injectors for Front Flanges to direct the gas flow horizontally.  Also try Port Plugs.

VTR7000 - Vacuum Flanges

An alternative to used or high priced OEM flanges.

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