VTR7000 - Products & Upgrades

Enhance your BEU with the new Geneva Drive

The Geneva Drive upgrade is a pneumatic driven turntable that replaces the original factory system.  The standard BEU drive unit on a VTR7000 includes a stepper motor and two timing belts which are prone to failure, require proper tensioning, and generate particles.  The original H-plate on which supports the wafer towers is thin and can flex under full loads causing misalignment.

The Geneva Drive gives increased support for the process boat, reducing deflection and error, which allows the customer longer periods between required boat calibrations.  This upgrade is a great enhancement for OEE and uptime on vertical furnaces.

Download or print a Geneva Drive Brochure (PDF Format)

TIPS:  Do you have Intermittent Door seal problems?

Try Spring Loaded Door Struts

Improve your sealing capability on LPCVD and Atmospheric VTR7000 Vertical Furnaces with Spring Loaded Door Struts.  Each door requires two door supports and one locating door strut. 

Spring Loaded Door Struts will help to eliminate cracking and splintering of quartz pedestal feet on Atmospheric VTR systems.  The spring loaded action still allows for proper sealing pressure for your Tursite seal and o-ring without over-compression that can cause premature failure and burning of the seals.

On LPCVD VTR systems, Spring Loaded Door Struts will help give an even distribution of compression of the door plate to the vacuum flange.  This will help eliminate over-compression and o-ring deformation.  Over-compression can result in "Sticking" o-rings, where the o-ring melts to the vacuum flange and door.

NEW!!:  Visual Indicator for Spring Loaded Door Struts

We have increased the stroke by over 50% from the factory original Spring Loaded Door Struts and added visual indicator on both sides.  No longer is it difficult to see how much your door is compressed.  Each strut can be checked to ensure proper compression.

Download our Quote Request Form (PDF Format) and fax it back to us today for a quote.

PCE Mypro 4-Board Card Cage

InVac Systems has available complete 4-board Mypro control systems from Brooks Automation (formerly Semy) used on VTR 7000 vertical furnaces.  Included in the card cage assembly are the extended analog board, the extended digital board, and the extended CPU board.  Aviza/SVG PCE software e-proms are not included.

Reference Part Numbers:

Download or print a PCE Mypro Card Cage Brochure (PDF Format)

PCE Mypro Remote Maintenance Terminal

InVac Systems has available complete, used, self contained, remote PCE Mypro maintenance terminals from Brooks Automation (formerly Semy) used on VTR 7000 vertical furnaces.  Included are the touch screen, floppy drive, numeric key board, and full interface cables. 

The remote terminal can be used to take direct control of a furnace from the rear while performing repairs or preventive maintenance.  It is a great tool for technicians to use during troubleshooting.

Download or print a Maintenance Terminal Brochure (PDF Format)

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