VTR7000 Vacuum Flanges for Poly, Nitride, and Teos Vertical Furnaces used in Semiconductor Industry

Semiconductor

Specialty Products

VTR7000 - Vacuum Flanges for Poly Systems

InVac Systems offers an alternative to used or high priced OEM flanges for Poly VTR's. Our Flange, as shown, is a direct replacement for the OEM. The vacuum port is an ISO-80. The tube seal o-ring is a standard 2-451.

Our flanges are new, not refurbished. We also offer repair services for SVG, Thermco, & Aviza flanges.

Stay Tuned! InVac Systems is working on replacement flanges for Nitride and Teos applications.

Download our Quote Request Form (PDF Format) and fax it back to us today for a quote.

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