Quartz Products - Paddle Alignment Kit

InVac Systems offers a new alternative to aligning paddles on horizontal furnaces.  Our all quartz design allows the user to simulate a full load of production wafers.  Each quartz disk is equivalent to 25 silicon wafers.  You can adjust the position and quantities of disks used to simulate your production line.

We also include an alignment disk with cross-hare to show your tube center-line.  There is no need to remove back plates when you can simply remove the foreline or rear injectors and view the cross-hare.  It makes paddle adjustments easier than ever without cooling down the furnace.

Included in the kit:  Ten 150 or 200mm disks, One alignment disk with cross-hair, One end boat for alignment disk, Five boats slotted to hold 2 disk each.  One Sur-Lok II ^TM quartz boat handle. 

US Patent 6669253.

 Download or print a Paddle Alignment Kit Brochure (PDF Format)

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