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![]() InVac Systems Semiconductor Specialty Products Hardware Optimization
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Hardware Optimization InVac Systems has design experience in Atmospheric and LPCVD furnace systems. Let our team of designers review your current hardware configuration and we can help determine the best solution to minimize downtime and maximize time between maintenance. On LPCVD systems we can reduce vacuum leaks and optimize maintenance by redesigned the vacuum foreline and components. InVac Systems also has the capability to furnish all of the foreline spool pieces at a great savings. On Atmospheric systems we can create a more positively sealed system with modifications to the quartz process tube and door systems, or by adding state of the art fittings and components.
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