InVac Systems
Semiconductor
Specialty Products
HTR Products
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InVac Systems
Semiconductor Specialty Products HTR Products
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Horizontal Furnace - Products & Upgrades
Multi-Channel H20 Flow Monitor
InVac Systems & innovative Silicon Systems offers a compact, cost effective unit designed to closely monitor and control multiple cooling water flows to critical equipment components, such as LPCVD vacuum flanges on horizontal furnaces. The Multi-Channel Flow Monitor (MFM) is available in configurations for 2-6 cooling water loops, each incorporating a metering valve and a flow rate sensor with digital readout, visual alarm, and both analog and digital outputs. Each leg of the MFM can be configured for one of the three different standard flow rate ranges:
Each leg can be configured with either 1/4" or 3/8" compression fittings for easy connection.
FlowGuard - Water Flow Monitor
InVac Systems & innovative Silicon Systems introduces a new line of low-cost cooling water flow monitors with the all the features of the more expensive models. The FlowGuard is capable of measuring extremely low flow rates from 0.3 GPH to 32 GPH and provides a two digit LED put readout of flow, a user-settable alarm, a 0-5V analog output signal and a digital alarm output signal. The flow sensor is small and uses a Pelton-type turbine wheel to determine the flow rate of the water. The rotation rate of the turbine wheel is linear over a large dynamic range. Infra-red light is alternatively reflected and absorbed from spokes on the small turbine wheel as it rotates in response to flow. A photo-diode detects the pulses of reflected light and the electronics converts these pulses into a dc voltage that is proportional to the flow. The signal is very stable, repeatable and has no zero drift. The electronics module provides power to the flow sensor and receives its output signal. It converts the signal, displays it in GPH on a 2 digit LED and provides a 0-5 VDC linear output signal for remote monitoring or data logging. The module also features a user-settable alarm level. If the monitored flow falls below that level, a visual alarm comes on (audible alarm optional) and a digital output (contact closure) is provided. All the components are mounted in a tough PVC enclosure. Each leg of the MFM can be configured for one of the three different standard flow rate ranges:
Each leg can be configured with either 1/4" or 3/8" compression fittings for easy connection.
Process Tube Cover
InVac Systems
&
VAutomation
offers an advanced product for sealing horizontal furnace scavengers. The
Process Tube Cover is fully retractable.
It can be designed to fit any make or model of horizontal furnace. It can be
used in manual or automatic mode, and can be integrated with the process
recipe. It is designed to seal the scavenger to reduce heat loss, improve
exhaust efficiency, reduce particles in the process tube, improve operator and
product safety, and conserve energy. It is designed for easy removal and
installation. Perfect for Atmoscan® applications where boat loading is in close
vicinity to the scavenger.
TIPS: Do you know the State of your Furnace?
InVac Systems & VAutomation offers a unique tool for viewing the status or your horizontal furnace or other tools. Our panel includes five large color indicator lights (1.6") with four levels for a complete four stack. The five color-coded indicators are: Abort, Alarm, In-Process, Idle and Cool-Down. The red and yellow indicator lights for Abort and Alarm flash for warning. The panel is easy to install and connects directly to the furnace (I/O) Relay module. You can connect directly at the tool, or use as a remote display panel. The individual Light Status Panels can be connected via RS485 to a Remote Status Panel that would show the status of an entire facility. You can connect up to 127 different pieces of equipment. The panel can be customized
for single/multiple tool applications at your request.
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