Horizontal Furnace - Rear Flange Back Plates

InVac Systems has a perfect addition to your rear flange - a removable back plate. You no longer have to compromise the flange vacuum seal in order to have access to the rear of your process chamber. Our removable back plates make maintenance easier for removing process liners, injectors, and vacuum components. 

Each back plate can be designed, process specific, to accommodate the exact Profile TC and internal injector positions required for process tubes with and without liners. 

Our back plates can adapt to almost any vacuum connection: ISO, KF, etc...

Do different injector locations confuse your technicians?  Do you have single port rear plates used with a liner and without?  We will engrave your back plate with a specific process name or furnace name at your request to eliminate any assembly errors during maintenance.

Eliminate Errors Engrave your Plates Today!

TIPS:  How do you seal your Profile TC and Injectors?

 Ultra-Torr Fittings create a great vacuum seal for LPCVD systems.  They are commonly used in applications where fixed positioning of the Profile TC is performed manually on each furnace.  They are also commonly used on applications where more than one TC or Injector are clustered together in a tight area.

  Ball Joint Fittings also create a great vacuum seal for LPCVD systems.  They are commonly used in applications where fixed, repeatable, placement of the Profile TC, or Injector, is required.  Ball Joints can be used in conjunction with Ultra-Torr Fittings for tight area applications, or by themselves, as long as enough space is allowed for the pinch clamps.

Download or print a Flange Back Plate Brochure (PDF Format)

Download our Back Plate Specification Form (PDF Format)

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