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![]() InVac Systems Semiconductor Specialty Products ESD
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ESD - Electro Static Discharge
Can it Affect Semiconductors? What can You do to Protect Your Facility? 1) Wafer Cassettes and Boxes - Upgrade your cassettes and boxes to an ESD material like Peek or Flourosentry. If you use Poly-pro cassettes and boxes, your wafers may be carrying a charge. 2) Wafer Transfer Tools - Upgrade your pusher and retainer combs to a high temperature ESD material like Semitron Esd 410C PolyEthermide (Ultem) material. This is a static dissipative material that will withstand temperatures from 170oC to 210oC. 3) Slide Transfers - Did you know: You can have a Positively charged plastic cassette and a Negatively charged slide transfer post. When you perform the transfer, silicon particles can be sprayed across the wafer through Electrostatic Discharge. Don't take the risk. Replace your old slide transfers with ones that are made of Tivar 1000 Antistatic UHMW Polyethylene. This is a static dissipative and conductive material that is manufactured by adding carbon powder to the resin. 4) Ionizers - Install ionizers in all critical wafer handling areas. This should include over all wafer transfer tools and work stations. Do you need help with ESD? Contact Us and we can Audit your facility. |
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