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Stainless Steel Vacuum
End Cap Flanges
InVac Systems
specializes in the design and manufacture of vacuum end cap flanges for
Quartz, SiC, or Alumina tubes for the Semiconductor, Solar, and MEM's
Industries.
We offer water cooled flanges, CDA cooled flanges, or
non-cooled flanges for low temperature applications.
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Our Spare
Parts Division has a extensive
inventory of new and used
Furnace parts:
BTI Furnace
Parts
- 7355X System Controllers
- Intempos Temperature Controllers
- 7900 & 8107 Gas Controllers
- 7670 & 7680 Loader Controllers
- 7670 & 7680 Loader Rail Assemblies
- Direction & Cryco Clamp Assemblies
- Load Station Blowers & Hepa Filters
Used Mass Flow Controllers (MFC's)
- Unit/Celerity 1000, 1100, 1661
MKS Parts
- Throttle Valve Controllers
- Foreline Heaters
- Baratrons
Persys Ext Torch Systems
- PET 986 Torch Assemblies
- PET 993 Torch Assemblies
- 2-Piece & Chambector Quartz Chambers
- PIB 987G Controllers
New and Used Quartz & SiC
- SiC Paddles (2" Sqr Handle)
- 150mm SiC Boats, Baffle Boats & Baffles
- 150mm Quartz Boats & Baffle Boats
- Quartz Paddle Alignment Kits
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